# I-Corps: Translation Potential of Chemical Process Simulation for Advanced Semiconductor Device Manufacturing

> **NSF 01002526DB NSF RESEARCH & RELATED ACTIVIT** · North Carolina State University (NC) · $50,000

## Abstract

This I-Corps project investigates the commercial potential of a software package and database system to simulate and predict chemical reactions during semiconductor manufacturing. In current semiconductor manufacturing, forming nanoscale patterns requires hundreds of consecutive, precisely controlled chemical reactions to deposit and etch thin films. As devices shrink and evolve in structure, developing new processes is time intensive and costly. Process optimization often proceeds through trial and error, consuming chemicals and generating waste from scrapped material. A rapid, accurate simulation procedure for these reactions would save considerable time and money and accelerate the development of new products. Providing engineers with real-time simulation data will alleviate many of the most restrictive pain points of the process development burden, providing a significant economic benefit. Furthermore, the understanding gained from accurately programming these chemical mechanisms will generate new insights into nanoscale reaction engineering, promoting the progress of science. Microchips manufacturing is crucial for civilian and military technologies, so the advantage provided by computer simulations will have uses in both commercial and national defense applications.

This I-Corps project utilizes experiential learning coupled with a first-hand investigation of the industry ecosystem to assess the translation potential of the technology. This solution is based on the d

## Key facts

- **NSF award ID:** 2534684
- **Awardee organization:** North Carolina State University (NC)
- **SAM.gov UEI:** U3NVH931QJJ3
- **PI:** Gregory Parsons
- **Primary program:** 01002526DB NSF RESEARCH & RELATED ACTIVIT
- **All programs:** Advanced Manufacturing
- **Estimated total:** $50,000
- **Funds obligated:** $50,000
- **Transaction type:** Standard Grant
- **Period:** 09/15/2025 → 08/31/2026

## Primary source

NSF Award Search: https://www.nsf.gov/awardsearch/showAward?AWD_ID=2534684

## Citation

> US National Science Foundation, Award 2534684, I-Corps: Translation Potential of Chemical Process Simulation for Advanced Semiconductor Device Manufacturing. Retrieved via AI Analytics 2026-06-07 from https://api.ai-analytics.org/grant/nsf/2534684. Licensed CC0.

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