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Mandatory Reporting of Greenhouse Gases: Changes to Provisions for Electronics Manufacturing To Provide Flexibility

air-emissions · Rule · Published 2011-09-27 · Effective 2011-09-30 · 76 FR 59542

Document

Document number
2011-24364
Federal Register citation
76 FR 59542
CFR reference
40 CFR 98
Type
Rule
Action
Final rule.
Category
air-emissions
Publication date
2011-09-27
Effective date
2011-09-30
EPA docket
EPA-HQ-OAR-2009-0927

Abstract

EPA is issuing a regulation to amend the calculation and monitoring provisions in the Electronics Manufacturing portion of the Greenhouse Gas Reporting Rule for the "largest" semiconductor manufacturing facilities (i.e., those that fabricate devices on wafers measuring 300 millimeters or less in diameter and that have an annual manufacturing capacity of greater than 10,500 square meters). More specifically, for reporting years 2011, 2012, and 2013, these amendments allow the largest semiconductor facilities the option to calculate emissions using default emission factors already contained in the regulations, instead of recipe-specific utilization and by-product formation rates for the plasma etching process type. In addition, this action extends two deadlines in the provisions related to the use of best available monitoring methods.

Source

Authoritative
Federal Register document
Machine
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